Isorex R310 1 |top| -

Due to its chemical nature, ISOREX R310/1 requires strict adherence to safety protocols. It is classified as an irritant to the skin, eyes, and respiratory tract.

For e-beam or extreme UV applications where outgassing contaminates optics, Isorex R310 1 is formulated to minimize volatile compounds. isorex r310 1

| Problem | Possible Cause | Solution with Isorex R310 1 | |---------|----------------|------------------------------| | Poor adhesion | Insufficient HMDS | Re-run vapor prime; add adhesion promoter (e.g., AP3000) | | Swelling during development | Overexposure or overbake | Reduce dose by 20% or lower PEB to 100°C | | Residue (scumming) | Underexposure or cold developer | Increase dose by 15%; warm developer to 23°C | | Pinholes | Contaminated substrate | Filter resist before use; reclean wafer | | Notching at substrate interface | Reflective notching | Add anti-reflective coating (BARC) under resist | Due to its chemical nature, ISOREX R310/1 requires